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CMP Test Wafer 3D ILD Pattern

CMP Test Wafer 3D ILD Pattern

Very useful for CMP research and development applications! Patterns with high step heights are also available.

At Advanced Materials Technology, we supply wafers that incorporate cutting-edge technologies necessary for research and development in film formation, CMP, cleaning, etching, and TSV, particularly among test wafers. The image shows an example of HDP and SiN on Si. We can accommodate 200mm and 300mm sizes. Please consult us regarding the types of films available based on your preferences. We also offer patterns with high step heights, which are very useful for CMP research and development purposes. *For more details, please download the catalog or contact us.*

  • Other semiconductors
  • Wafer

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